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Al2O3 TiO2 Magnetron Sputtering Deposition System For Medical Treatment

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Al2O3 TiO2 Magnetron Sputtering Deposition System For Medical Treatment

Name: Al2O3 TiO2 Magnetron Sputtering Deposition System For Medical Treatment
Brand: ZEIT
Price: 1 USD

Brand Name : ZEIT

Model Number : MSC-MT-X—X

Certification : Case by case

Place of Origin : Chengdu, P.R.CHINA

MOQ : 1set

Price : Case by case

Payment Terms : T/T

Supply Ability : Case by case

Delivery Time : Case by case

Packaging Details : Wooden case

Weight : Customizable

Size : Customizable

Customizable : Available

Guarantee period : 1 year or case by case

Shipping Terms : By Sea / Air / Multimodal Transport

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Magnetron Sputtering Deposition in Medical Treatment Industry

Applications

Applications	Specific Purpose	Material Type
Medical treatment	Biocompatible materials	Al₂O₃, TiO₂

Working Principle
The basic principle of magnetron sputtering is that electrons collide with argon atoms in the process of flying to

the substrate under the action of electric field, the produced argon ions bombard target surface. After the energy

exchange, the atoms on the target surface escape from the original lattice and are transfered to the substrate

surface to form films.

Features

Model	MSC-MT-X—X
Coating type	Various dielectric films such as metal film, metal oxide and AIN
Coating temperature range	Normal temperature to 500℃
Coating vacuum chamber size	700mm * 750mm * 700mm (Customizable)
Background vacuum	< 5×10^-7mbar
Coating thickness	≥ 10nm
Thickness control precision	≤ ±3%
Maximum coating size	≥ 100mm (Customizable)
Film thickness uniformity	≤ ±0.5%
Substrate carrier	With planetary rotation mechanism
Target material	4×4 inches (compatible with 4 inches and below)
Power supply	The power supplies such as DC, pulse, RF, IF and bias are optional
Process gas	Ar, N₂, O₂
Note: Customized production available.

Coating Sample

Process Steps
→ Place the substrate for coating into the vacuum chamber;
→ Roughly vacuumize;
→ Turn on molecular pump, vacuumize at top speed, then turn on the revolution and rotation;
→ Heating the vacuum chamber until the temperature reaches the target;
→ Implement the constant temperature control;
→ Clean elements;
→ Revolve and back to the origin;
→ Coating film according to process requirements;
→ Lower temperature and stop the pump assembly after coating;
→ Stop working when the automatic operation is finished;

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Al2O3 TiO2 Magnetron Sputtering Deposition System For Medical Treatment

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Al2O3 TiO2 Magnetron Sputtering Deposition System For Medical Treatment

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Al2O3 TiO2 Magnetron Sputtering Deposition System For Medical Treatment

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Al2O3 TiO2 Magnetron Sputtering Deposition System For Medical Treatment

Al2O3 TiO2 Magnetron Sputtering Deposition System For Medical Treatment

Medical Treatment Magnetron Sputtering Deposition

Al2O3 TiO2 Magnetron Sputtering Deposition

Medical Treatment magnetron sputtering system

Al2O3 TiO2 Magnetron Sputtering Deposition System For Medical Treatment Images